XY Clear Aperture stage is built for high speed and high precision with low settling time. The stage is used for high-precision applications, ranging from two-sided wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology powered by DX B Ironless Linear motors where high-accuracy and precise geometric performance are necessary.

Features:

• Integrated, low-profile XY linear-motor stage with clear aperture
• Superior geometric performance
• Optimised for high-dynamic applications
• Speeds up to 2 m/s and accelerations up to 1G
• Customisable solutions available

Downloads

The Stages and Gantries Catalogue and relevant files are also available at the DOWNLOADS section of this site.
The technical files and content (i.e. 3D Drawings, Manuals and Software) in the download area are available only for registered users.
Please register and login using the link on the top of this page to view and access these files. Registration is free. 

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