PBA Co-Planar XY Theta Air Bearing Nano Precision Gantry with Z axis uses PBA ironless linear motor. Zero cogging features help to lower the setting time, which provides excellent smooth motion and positioning accuracy.
Co-Planar XY Theta Air Bearing Nano Precision Gantry with Z axis
- Ideal for wafer scribing application
Glass substrate exposure
Wafer defect detection equipment
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