PAS Series Alignment Module is a low-profile, 3-axis, XYθ motion, compact, miniature stage.
Ideal for closed loop short stroke positioning applications where precision, repeatability, and low speed/force ripple are of utmost importance.
PBA PAS Module is powered by PBA direct drive motors and comes with built-in precision cross roller guides that provide high rigidity to complement the high acceleration capability of the PAS module which has very low electrical/mechanical time constants and zero hysteresis. With the combination of a high-resolution linear encoder, PBA PAS Module ensures high-accuracy positioning operation without any backlash. It is most suitable for alignment processing utilizing image processing such as semiconductor and liquid crystal-related manufacturing equipment, and positioning mechanisms for measuring equipment and inspection instruments that require clean environments.
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- Direct drive technology
- Compact and low profile
- Cross roller bearing for excellent precision and rigidity
- Zero cogging, zero backlash and zero hysteresis
- Low moving mass, fast response
- Integrated high-precision linear encoder
- Excellent reliability
- Stackable configuration
Suitable Application
- Alignment process
- Inspection
- Pick and Place
- Dispensing
- Printing
- Laser marking
PAS-XYR Stage
