The PABL actuators are the highest performance actuator available. They are ideal for demanding application where nano-positioning accuracy and geometric performance are critical. This stage provides the ultimate solution whether the application requires small, accurate steps or constant smooth velocity.
Thanks to non-contact air bearing, non-contact linear motor drive, and non-contact feedback device, PABL Air bearing actuator ensure years of maintenance-free operation at high performance level. Since there is no mechanical contact between moving components, PABL actuator remains free from wear and performance degradation over time. Its service life is practically unlimited, and due to the absence of lubrication and the use of only clean, dry gas, air bearings are exceptionally suitable for cleanroom.
With its high-performance features, innovative design, and zero maintenance capabilities, the PABL is the ideal solution for any precision motion control needs.
Key Features
- High performance Nano positioning actuator
- Max recommend load 50 kg
- Max Stroke 500mm
- High precision +/- 0.2um
- Zero cogging
- Dynamic responsiveness
- Maintenance free
- Lower velocity ripple
- Nano level in-position stability
APPLICATIONS
- Metrology
- Photonics
- Precision scanning in semiconductor
- Flat Panel Display manufacturing