PBA XY Theta Clear Aperture High Precision Stage offers a large clear aperture, high dynamics and exceptional geometric performance in a compact, low-profile package.
PBA XY Theta Clear Aperture High Precision Stage can be applied on applications, ranging from two-sided wafer processing where high dynamics and micrometre-level straightness are required, to quasi-static optical metrology powered by DX B, ARC Ironless Motors where high accuracy and precise geometric performance are necessary.