Built for Ultra-Precision: 75nm Vertical Motion Repeatability for Nano-Level AOI Applications

We have launched the very latest of our Z axis motion solutions: PZA-U Ultra-precision Z positioning actuator. Boasting an impressive 5nm minimum step and nano-level repeatability of 75nm, PZA-U sets an ultra-precision standard.  PZA-U redefines precision and versatility in vertical motion control, demanded by semiconductor manufacturing inspections and AOI applications for higher precision performances. It features PBA DX F Series Ironless linear motor with cross-roller, resulting in excellent geometric performance and ultra-low velocity ripple at low speed.

The customisable stroke feature allows adaptation to diverse application requirements, while the integrated pneumatic counterbalance system guarantees smooth and stable movements, enhancing operational efficiency and improving yield rates. Whether it is utilised in automated optical inspection, semiconductor wafer inspection, or vision detection systems, PZA-U delivers exceptional reliability, stability and repeatability to boost your machine performance.

Product Benefits:

• – Compact, space-efficient design for ease of integration into multi-axis motion system
• – Nano-level repeatability and low settling time to enhance image quality
• – Maximizes process output and reliability with DX F ironless direct drive motor
• – Zero Backlash – better force transmission compared to ball screw and other traditional actuators
• – Utilises high-precision cross-roller bearings to ensure outstanding dynamic performance and payload capacity
• – Enhanced safety feature with pneumatic counterbalance system to prevent axis movement in case the motor de-energizes accidentally

Product Features:

• -Powered by ironless motor
• -Up to 20kg payload
• -Nano-level repeatability of 75nm
• -5nm minimum step
• -Customisable stroke
• -Equipped with pneumatic counterbalance

Applications: 

• -Semiconductor inspection & quality control
• -Artificial intelligence AOI motion control
• -Optics production, examination & inspection
• -Laboratory research & experimentation
• -Sensor qualification & testing
• -Photonics assembly & testing
• -Fibre alignment & enhancement

PBA Systems is an ISO-certified company and a member of the PBA Group. We are direct drive motion solutions expert for automation. We provide component, motor, to systems integration, and custom design services. Our advanced, High Precision Direct Drive Motor Technology improves the positioning, torque control, and efficiency of robotics systems, which are crucial in automation manufacturing. PBA Group specialises in proprietary robotic automation technologies. Headquartered in Singapore; with advanced manufacturing and technology centres in Taiwan, Japan, Korea, Malaysia, Thailand and China; we have the capabilities of providing customised, swift motion solutions for global customers and system partners.

For more information:

Sales Contacts: [email protected]